Vertical transistor with back bias and reduced parasitic capacitance

ABSTRACT

A method of making a vertical transistor device includes forming a front gate and a back gate opposite a major surface of a substrate. The front gate and the back gate are symmetric and arranged on opposing sides of a channel between the front gate and the back gate. The channel extends from a drain to a source. The method includes disposing a mask to cover the front gate and removing the back gate. The method further includes replacing the back gate with a layer of insulator and another back gate stack. The another back gate stack only covers a junction between the channel and the source, and remaining portions of the back gate are the layer of insulator.

PRIORITY

This application is a continuation of and claims priority from U.S.patent application Ser. No. 15/477,355, filed on Apr. 3, 2017, entitled“VERTICAL TRANSISTOR WITH BACK BIAS AND REDUCED PARASITIC CAPACITANCE,”the entire contents of which are incorporated herein by reference.

BACKGROUND

The present invention relates in general to complementary metal oxidesemiconductor (CMOS) technology, and more specifically, to verticaltransistors with back bias and reduced parasitic capacitance.

CMOS technology is used to construct integrated circuits such asmicroprocessors, microcontrollers, static random access memory (RAM) andother digital logic circuits. A basic component of CMOS designs is metaloxide semiconductor field effect transistors (MOSFETs). As MOSFETs arescaled to smaller dimensions, various designs and techniques areemployed to improve device performance. Vertical transistors (VFET), inwhich source/drain regions are arranged on opposing ends of a verticalchannel region, are attractive candidates for scaling to smallerdimensions.

SUMMARY

According to one or more embodiments of the invention, a method ofmaking a vertical transistor device includes forming a front gate and aback gate opposite a major surface of a substrate. The front gate andthe back gate are symmetric and arranged on opposing sides of a channelbetween the front gate and back gate. The channel extends from a drainto a source. The method includes disposing a mask to cover the frontgate and removing the back gate. The method further includes replacingthe back gate with a layer of insulator and another back gate stack. Theanother back gate stack only covers a junction between the channel andthe source, and remaining portions of the back gate are the layer ofinsulator.

According to one or more embodiments, a method of making a verticaltransistor device includes forming a front gate and a back gate on asubstrate. The front gate and the back gate are symmetric and arrangedon opposing sides of a channel between the front gate and the back gate,and the channel extends vertically from a drain to a source. A bottomspacer is arranged between the front gate and the drain and between theback gate and the drain. A top spacer is arranged between the front gateand the source and the back gate and the source. An interleveldielectric (ILD) is deposited on the front gate and the back gate. Themethod further includes disposing a mask to cover the front gate andrecessing the ILD to expose the back gate. The method further includesremoving the back gate and a portion of the top spacer on the back gate.The method further includes depositing a layer of insulator in anopening where the back gate was removed. The method includes recessingthe layer of insulator, and depositing a back gate stack on the layer ofinsulator. The method further includes recessing the back gate stacksuch that the back gate stack extends from the layer of insulator to thetop spacer.

According to one or more embodiments, a vertical transistor deviceincludes a drain arranged on a substrate and a channel extendingvertically from the drain to a source. The device includes a front gatestack arranged on one side of the channel. The front gate stack contactsthe source, the channel, and the drain. The device further includes aback gate stack arranged on an opposite side of the channel. The backgate stack is arranged on an insulator layer and has a thickness that issmaller than a thickness of the front gate stack.

BRIEF DESCRIPTION OF THE DRAWINGS

The subject matter which is regarded as embodiments of the invention isparticularly pointed out and distinctly claimed in the claims at theconclusion of the specification. The foregoing and other advantages ofthe embodiments of the invention are apparent from the followingdetailed description taken in conjunction with the accompanying drawingsin which:

FIG. 1 is a cross-sectional side view of a vertical transistor (VFET)with back bias capability and reduced parasitic capacitance according toone or more embodiments of the invention;

FIGS. 2-10 illustrate exemplary methods of making vertical transistorsaccording to one or more embodiments of the invention, in which:

FIG. 2 is a cross-sectional side view of a vertical transistor (VFET)with symmetric front and back gates;

FIG. 3 is a cross-sectional side view after disposing a mask on thefront gate side;

FIG. 4 is a cross-sectional side view after recessing the interleveldielectric (ILD) to expose the back gate;

FIG. 5 is a cross-sectional side view after removing the exposed backgate metal;

FIG. 6 is a cross-sectional side view after filling the back gateopening with an insulator;

FIG. 7 is a cross-sectional side view after recessing the insulator;

FIG. 8 is a cross-sectional side view after depositing a back gatedielectric and metal stack;

FIG. 9 is a cross-sectional side view after recessing the back gatestack; and

FIG. 10 is a cross-sectional side view after removing the mask anddepositing an ILD.

DETAILED DESCRIPTION

Embodiments of the present invention are described herein with referenceto the related drawings. Alternative embodiments can be devised withoutdeparting from the scope of this invention. It is noted that variousconnections and positional relationships (e.g., over, below, adjacent,etc.) are set forth between elements in the following description and inthe drawings. These connections and/or positional relationships, unlessspecified otherwise, can be direct or indirect, and the presentinvention is not intended to be limiting in this respect. Accordingly, acoupling of entities can refer to either a direct or an indirectcoupling, and a positional relationship between entities can be a director indirect positional relationship. As an example of an indirectpositional relationship, references in the present description toforming layer “A” over layer “B” include situations in which one or moreintermediate layers (e.g., layer “C”) is between layer “A” and layer “B”as long as the relevant characteristics and functionalities of layer “A”and layer “B” are not substantially changed by the intermediatelayer(s).

The following definitions and abbreviations are to be used for theinterpretation of the claims and the specification. As used herein, theterms “comprises,” “comprising,” “includes,” “including,” “has,”“having,” “contains” or “containing,” or any other variation thereof,are intended to cover a non-exclusive inclusion. For example, acomposition, a mixture, process, method, article, or apparatus thatcomprises a list of elements is not necessarily limited to only thoseelements but can include other elements not expressly listed or inherentto such composition, mixture, process, method, article, or apparatus.

Additionally, the term “exemplary” is used herein to mean “serving as anexample, instance or illustration.” Any embodiment or design describedherein as “exemplary” is not necessarily to be construed as preferred oradvantageous over other embodiments or designs. The terms “at least one”and “one or more” are understood to include any integer number greaterthan or equal to one, i.e. one, two, three, four, etc. The terms “aplurality” are understood to include any integer number greater than orequal to two, i.e. two, three, four, five, etc. The term “connection”can include an indirect “connection” and a direct “connection.”

References in the specification to “one embodiment,” “an embodiment,”“an example embodiment,” etc., indicate that the embodiment describedcan include a particular feature or characteristic, but every embodimentmay or may not include the particular structure or characteristic.Moreover, such phrases are not necessarily referring to the sameembodiment. Further, when a particular structure or characteristic isdescribed in connection with an embodiment, it is submitted that it iswithin the knowledge of one skilled in the art to affect such structureor characteristic in connection with other embodiments whether or notexplicitly described.

For purposes of the description hereinafter, the terms “upper,” “lower,”“right,” “left,” “vertical,” “horizontal,” “top,” “bottom,” andderivatives thereof shall relate to the described structures andmethods, as oriented in the drawing figures. The terms “overlying,”“atop,” “on top,” “positioned on” or “positioned atop” mean that a firstelement, such as a first structure, is present on a second element, suchas a second structure, wherein intervening elements such as an interfacestructure can be present between the first element and the secondelement. The term “direct contact” means that a first element, such as afirst structure, and a second element, such as a second structure, areconnected without any intermediary conducting, insulating orsemiconductor layers at the interface of the two elements. It should benoted that the term “selective to,” such as, for example, “a firstelement selective to a second element,” means that the first element canbe etched and the second element can act as an etch stop.

As used herein, the terms “about,” “substantially,” “approximately,” andvariations thereof are intended to include the degree of errorassociated with measurement of the particular quantity based upon theequipment available at the time of filing the application. For example,“about” can include a range of ±8% or 5%, or 2% of a given value.

For the sake of brevity, conventional techniques related tosemiconductor device and integrated circuit (IC) fabrication may or maynot be described in detail herein. Moreover, the various tasks andprocess steps described herein can be incorporated into a morecomprehensive procedure or process having additional steps orfunctionality not described in detail herein. In particular, varioussteps in the manufacture of semiconductor devices andsemiconductor-based ICs are well known and so, in the interest ofbrevity, many conventional steps will only be mentioned briefly hereinor will be omitted entirely without providing the well-known processdetails.

Turning now to a description of technologies that are more specificallyrelevant to aspects of the present invention, dopant fluctuations affectthreshold voltage (V_(t)) control in advanced semiconductor devices,such as static random access memory (SRAM). As semiconductor devicesbecome smaller, V_(t) control becomes more challenging. One method toincrease V_(t) control is to use back gates, such as found in FinFETsand other double gate transistors, to control Vt in the semiconductordevices.

However, FETs with back bias typically have the back grate overlappingthe entire transistor structure, including the source, drain, andchannel regions. The large overlap between the back gate and thetransistor can create undesired parasitic capacitance. Therefore, thereis a need for forming vertical transistors with back bias capability andreduced parasitic capacitance.

Accordingly, described herein are fabrication methods and resultingdevice structures for vertical transistors with back bias capability andreduced parasitic capacitance. The process flows provide a device inwhich the back gate is placed only on the source side, instead of acrossthe entire channel. The back gate modulates the barrier height at thesource-channel junction, and therefore, the V_(t) of the verticaltransistor. Applying different voltages at the back gate can tune thedevice characteristics.

Turning now to a detailed description of aspects of the presentinvention, FIG. 1 is a cross-sectional side view of a verticaltransistor (VFET) with back bias capability and reduced parasiticcapacitance according to one or more embodiments of the invention. Achannel 104 is formed on a substrate 101, flanked by a bottom drain 102and a top source 103. A front gate 120 includes a bottom spacer 110 anda top spacer 111. A smaller back gate 121 is confined to the source 103side (top side) of the device, with a thick layer of insulator 130arranged between the back gate 121 and the bottom spacer 110. The gatesof the device are asymmetric, with the back gate 121 only contacting thechannel 104 at the source 103 side.

FIGS. 2-10 illustrate exemplary methods of making vertical transistorsaccording to one or more embodiments of the invention. FIG. 2 is across-sectional side view of a vertical transistor (VFET) with symmetricfront and back gates, which is the starting point for the process flow.

The substrate 201 includes one or more semiconductor materials.Non-limiting examples of suitable substrate 201 materials include Si(silicon), strained Si, SiC (silicon carbide), Ge (germanium), SiGe(silicon germanium), SiGeC (silicon-germanium-carbon), Si alloys, Gealloys, III-V materials (e.g., GaAs (gallium arsenide), InAs (indiumarsenide), InP (indium phosphide), or aluminum arsenide (AlAs)), II-VImaterials (e.g., CaSe (cadmium selenide), CaS (cadmium sulfide), CaTe(cadmium telluride), ZnO (zinc oxide), ZnSe (zinc selenide), ZnS (zincsulfide), or ZnTe (zinc telluride)), or any combination thereof.

The drain 202 is formed on the substrate 201. The drain 202 is widerthan the channel 204 and is arranged beneath the front gate stack 220and the back gate stack 220′. The drain 202 can be a doped semiconductorlayer. The semiconductor material can include, for example, silicon,germanium, or a combination thereof. The drain 202 can be formed bydepositing a semiconductor material on the substrate 201 and then dopingthe semiconductor material layer, or just doping the substrate 202. Thedopant can be a p-type dopant (e.g., boron or gallium) or an n-typedopant (e.g., phosphorus, arsenic, antimony). The drain 202 also can bean epitaxial semiconductor layer formed on the substrate 202. Theepitaxial semiconductor layer can be formed on the substrate 201 using asuitable growth process, for example, chemical vapor deposition (CVD)(liquid phase (LP) or reduced pressure chemical vapor deposition(RPCVD), vapor-phase epitaxy (VPE), molecular-beam epitaxy (MBE),liquid-phase epitaxy (LPE), metal organic chemical vapor deposition(MOCVD), or other suitable processes. The epitaxial layer can be, forexample, silicon, germanium, or a combination thereof. The drain 202 isa doped semiconductor material. Any suitable techniques, including butnot limited to, ion implantation, gas phase doping, plasma doping,plasma immersion ion implantation, cluster doping, infusion doping,liquid phase doping, solid phase doping, in-situ doped epitaxy, or anysuitable combination of those techniques, can be used to form the drain202.

Bottom spacers 210 (first spacers) are formed on the drain 202. Thebottom spacers 210 are arranged between the front gate stack 220 and thedrain 202, and between the back gate stack 220′ and the drain 202. Thebottom spacers 210 include an insulating material, for example, silicondioxide, silicon nitride, SiOCN, or SiBCN. Other non-limiting examplesof materials for the bottom spacers 210 include oxides (e.g., siliconoxide), dielectric nitrides (e.g., silicon nitride), dielectricoxynitrides, or any combination thereof. The bottom spacers 210 areinitially formed as a layer on the substrate 201 by a depositionprocess, for example, chemical vapor deposition (CVD) or physical vapordeposition (PVD). In some embodiments, the bottom spacer 210 is formedby a directional deposition (e.g., high density plasma chemical vapordeposition) followed by an etch-back process.

Gate stacks (front gate stack 220 and back gate stack 220′) are formedon the bottom spacers 210 on the substrate 101. The front gate stack 220and back gate stack 220′ are symmetric at this stage, arranged onopposing sides of the channel 204 therebetween. The front gate stack 220and back gate stack 220′ include dielectric layers (front gatedielectric layer 221 and back gate dielectric layer 221′). The frontgate dielectric layer 221 and the back gate dielectric layer 221′ linethe edges of the front gate stack 220 and back gate stack 220′ along thebottom spacer 210 and channel 204 surfaces.

Front gate dielectric layer 221 and back gate dielectric layer 221′ canbe dielectric materials having a dielectric constant greater than 3.9,7.0, or 10.0. Non-limiting examples of suitable materials for dielectriclayers include oxides, nitrides, oxynitrides, silicates (e.g., metalsilicates), aluminates, titanates, nitrides, or any combination thereof.Examples of high-k materials (with a dielectric constant greater than7.0) include, but are not limited to, metal oxides such as hafniumoxide, hafnium silicon oxide, hafnium silicon oxynitride, lanthanumoxide, lanthanum aluminum oxide, zirconium oxide, zirconium siliconoxide, zirconium silicon oxynitride, tantalum oxide, titanium oxide,barium strontium titanium oxide, barium titanium oxide, strontiumtitanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalumoxide, and lead zinc niobate. The high-k material can further includedopants such as, for example, lanthanum and aluminum. The gatedielectric material 1201 layer can be formed by suitable depositionprocesses, for example, chemical vapor deposition (CVD), plasma-enhancedchemical vapor deposition (PECVD), atomic layer deposition (ALD),evaporation, physical vapor deposition (PVD), chemical solutiondeposition, or other like processes. The thicknesses of the dielectriclayers vary depending on the deposition process as well as thecomposition and number of high-k dielectric materials used.

The front gate stack 220 and the back gate stack 220′ include a stack ofgate metals, including a work function metal disposed on the dielectriclayers 221, 221′. The types of work function metals used depend on thetype of transistor. Non-limiting examples of suitable work functionmetals include p-type work function metal materials and n-type workfunction metal materials. P-type work function materials includecompositions such as ruthenium, palladium, platinum, cobalt, nickel, andconductive metal oxides, or any combination thereof. N-type metalmaterials include compositions such as hafnium, zirconium, titanium,tantalum, aluminum, metal carbides (e.g., hafnium carbide, zirconiumcarbide, titanium carbide, and aluminum carbide), aluminides, or anycombination thereof. The work function metals are deposited by asuitable deposition process, for example, CVD, PECVD, PVD, plating,thermal or e-beam evaporation, and sputtering.

The front gate stack 220 and back gate stack 220′ each include one ormore gate metals. The gate metals are conductive gate metals that aredeposited over the work function metals to form the gate stacks.Non-limiting examples of suitable conductive metals include aluminum(Al), platinum (Pt), gold (Au), tungsten (W), titanium (Ti), or anycombination thereof.

Top spacers 211 (second spacers) are formed on the gate stacks (frontgate stack 220 and back gate stack 220′). The top spacers 211 arearranged between the front gate stack 220 and the source 203, andbetween the back gate stack 220′ and the source 203. The top spacers 211include an insulating material, for example, silicon dioxide, siliconnitride, SiOCN, or SiBCN. Other non-limiting examples of materials forthe top spacers 211 include oxides (e.g., silicon oxide), dielectricnitrides (e.g., silicon nitride), dielectric oxynitrides, or anycombination thereof. The top spacers 211 are formed as a layer on thegate stacks by a deposition process, for example, chemical vapordeposition (CVD) or physical vapor deposition (PVD).

The channel 204 extends vertically from the drain 202 to the source 203between the front gate stack 220 and the back gate stack 220′. Thechannel 204 is a semiconductor layer on the drain 202. In someembodiments, the channel 204 can be formed by using a suitable growthprocess, for example, chemical vapor deposition (CVD) (liquid phase (LP)or reduced pressure chemical vapor deposition (RPCVD), vapor-phaseepitaxy (VPE), molecular-beam epitaxy (MBE), liquid-phase epitaxy (LPE),metal organic chemical vapor deposition (MOCVD), or other suitableprocesses. In some embodiments, the channel 204 can be formed by firstpatterning a semiconductor substrate (e.g., to form the fin channel),forming the drain 202 and bottom spacer 210, and then forming the gate.The sources for the channel 204 can be, for example, silicon, germanium,or a combination thereof. The channel 204 includes a p-type dopant(e.g., boron or gallium) or an n-type dopant (e.g., phosphorus orarsenic, or antimony), depending on the type of transistor.

The source 203 is formed on the channel 204. The source 203 also can bean epitaxial semiconductor layer formed on the channel 204. The source203, like the drain 292, is wider than the channel 204. The source 203includes doped semiconductor material. The semiconductor material caninclude, for example, silicon, germanium, or a combination thereof. Thesource 203 includes a p-type dopant (e.g., boron or gallium) or ann-type dopant (e.g., phosphorus or arsenic), depending on the type oftransistor. The source 203 also can be an epitaxial semiconductor layerformed on the channel 204. The epitaxial semiconductor layer can beformed on the channel 204 and top spacers 211 using a suitable growthprocess, for example, chemical vapor deposition (CVD) (liquid phase (LP)or reduced pressure chemical vapor deposition (RPCVD), vapor-phaseepitaxy (VPE), molecular-beam epitaxy (MBE), liquid-phase epitaxy (LPE),metal organic chemical vapor deposition (MOCVD), or other suitableprocesses. The sources for the epitaxial layer can be, for example,silicon, germanium, or a combination thereof. The source 203 is a dopedsemiconductor material. Any suitable techniques, including but notlimited to, ion implantation, gas phase doping, plasma doping, plasmaimmersion ion implantation, cluster doping, infusion doping, liquidphase doping, solid phase doping, in-situ doped epitaxy, or any suitablecombination of those techniques, can be used to form the source 203.

An interlevel dielectric (ILD) 230 is deposited on the substrate 201 andaround the gate stacks (front gate stack 220 and back gate stack 220′).The ILD 230 is arranged on the top spacers 211. The ILD 230 can beformed from, for example, a low-k dielectric material (with k<4.0),including but not limited to, silicon oxide, spin-on-glass, a flowableoxide, a high-density plasma oxide, borophosphosilicate glass (BPSG), orany combination thereof. In some embodiments, a dielectric liner (e.g.,silicon nitride, not shown) can be deposited before the deposition ofILD 230. The ILD 230 is deposited by a deposition process, including,but not limited to CVD, PVD, plasma enhanced CVD, atomic layerdeposition (ALD), evaporation, chemical solution deposition, spin-on, orlike processes.

FIG. 3 is a cross-sectional side view after disposing a mask 301 on thefront gate side (front gate stack 220 side). The mask 301 covers andprotects the front gate side and can be any protective material that isresistant to the etch processes performed in FIGS. 4-9. The mask 301includes one or more layers. The mask 301 can include a hard mask layer,for example silicon nitride. The mask 301 also can include aplanarization layer, for example, an organic planarization layer (OPL)coating or other suitable spin-on coating. The planarization layer alsocan include an organic material, for example, a polymeric material. Theplanarization layer can be then patterned to expose the back gate sideby disposing an etch mask (not shown) over the planarization layer. Theetch mask can be a resist material, for example, a photoresist material.The overlay margin of the mask 301 is defined by the width of the source203, which is wider than the channel 204.

FIG. 4 is a cross-sectional side view after recessing the ILD 230 toexpose the back gate stack 220′. One or more etch processes areperformed to remove portions of the ILD 230 and top spacer 211 over theback gate stack 220′. The one or more etch processes dielectric etchprocesses that are selective to (do not etch) the metals (of the backgate stack 220′) and semiconductor materials (of the source 203). TheILD 230 is etched to a level below the back gate stack 220′, exposingthe side of the back gate stack 220′. A portion of the top spacer 221 isremoved to expose the top of the back gate stack 220′. A portion of thetop spacer 221 can remain beneath the source 203. The one or more etchprocesses used to recess the ILD 230 and the top spacer 211 can be, forexample, a plasma etch, a reactive ion etch (ME), a wet etch, or anysuitable combination of those techniques. In some embodiments, the ILD230 is recessed by a ME.

FIG. 5 is a cross-sectional side view after removing the exposed backgate stack 220′. The dielectric layer 221′ is exposed. One or more etchprocesses are performed to remove the back gate stack 220′. The one ormore etch processes are selective to (do not etch) dielectric materials(dielectric layer 221′ and ILD 230) and semiconductor materials (source203). The one or more etch processes used to remove the back gate stack220′ can be, for example, a plasma etch, a ME, a wet etch, or anysuitable combination of those techniques. In some embodiment, the backgate stack 220′ is etched by a directional RIE process followed by anisotropic etch process. For example, when the back gate stack 220′comprises tungsten and titanium nitride (TiN), tungsten can be etched bySF₆, CF₄, CBF₃, and or CHF₃ mixed with oxygen. TiN can is etched by awet etch process comprising ammonia and hydroperoxide.

Optionally, the exposed gate dielectric layer 221′ can be removed. Inother words, the exposed gate dielectric layer 221′ can be kept orremoved. Some embodiments include removing the back gate conductor onlyand keeping the original gate dielectric layer 221′, and then laterforming the new back gate only on the source side. Only the conductor isdeposited next to the original back gate dielectric layer.Alternatively, a conductor and a new gate dielectric layer are depositedon top of the original gate dielectric. In other embodiments, both theoriginal back gate conductor and gate dielectric are removed, and thenthe new back gate is formed only on the source side. In theseembodiments, both the new back gate dielectric and new back gateconductor are deposited. When the gate dielectric comprise hafniumoxide, it can be removed by a wet etch comprising diluted hydrofluoricacid and hydrochloride acid.

FIG. 6 is a cross-sectional side view after filling the back gate stackopening with an insulator 606. The insulator 606 is disposed directly onthe dielectric layer 221′ and extends over the ILD 230 and the source203. Non-limiting examples of insulating materials include, for example,nitrides (e.g., silicon nitride), oxides (e.g., flowable oxides, siliconoxide, aluminum oxide), or a combination thereof. The insulator 606 canbe formed using a suitable deposition process, including, but notlimited to CVD, PVD, plasma enhanced CVD, atomic layer deposition (ALD),evaporation, chemical solution deposition, or like processes. Theinsulator 606 is planarized by, for example, CMP.

FIG. 7 is a cross-sectional side view after recessing the insulator 606.The insulator 606 is recessed to a level that exposes the junction 701between the channel 204 and the source 203 (source-channel junction).The insulator 606 is recessed to a level below the channel 204. Althoughthe insulator 606 is shown as being recessed to about the same level asthe ILD 230, the insulator 606 can be recessed a level that is differentfrom the ILD 230, provided that the junction 701 is exposed. Also,although insulator 606 is shown as being recessed to a flat layer,insulator 606 does not have to be flat after recessing. The insulator606 can be recessed by one or more etch processes, for example, by a2-step etch process. In an exemplary embodiment, a first etch processincludes a directional etch by ME, and a second etch process includes anisotropic etch, such as hydrofluoric acid wet etching, or a chemicaloxide removal dry etching. After recessing the insulator 606,optionally, the original back gate dielectric is removed (as shown).Alternatively, the original back gate dielectric is not removed.

The thick layer of the recessed insulator 606 remaining on the bottomspacer 210 provides a surface to deposit the back gate metals (describedin FIG. 8 below). The thickness of the recessed insulator 606 generallyvaries. In one or more embodiments, the thickness of the recessedinsulator 606 (remaining insulator 606 after recessing) is at least 10nanometers (nm). In other embodiments, the thickness of the recessedinsulator 606 is in a range from about 10 to about 100 nm.

The portion of the dielectric layer 221′ along the channel 204 at thejunction 701 is optionally removed, as shown in FIG. 7. Although inother embodiments (not shown), the dielectric layer 221′ does not haveto be removed. Only the insulator 606 needs to be removed to a levelthat exposes the junction 701.

FIG. 8 is a cross-sectional side view after depositing a back gatedielectric layer 809 and back gate stack 808. The back gate dielectriclayer 809 is deposited before the back gate stack 808. The back gatedielectric layer 809 is optional if we keep the original back gatedielectric. The back gate dielectric layer 809 is deposited directly onthe insulator 606, on the ILD 230, and lines the channel 204 (or on topof the original gate dielectric if it is not removed), top spacer 211,and source 203. The dielectric layer 809 can be the same or differentfrom the dielectric layer 221′. The dielectric layer 809 also can have athickness that is the same or different from the dielectric layer 221′.In embodiments in which the dielectric layer 221′ is not removed fromthe junction 701 (see FIG. 7), the dielectric layer 809 is thendeposited on top of dielectric layer 221′ that lines the channel 204 andthe source 203.

The dielectric layer 809 can be dielectric materials having a dielectricconstant greater than 3.9, 7.0, or 10.0. Non-limiting examples ofsuitable materials for the dielectric layer 809 includes oxides,nitrides, oxynitrides, silicates (e.g., metal silicates), aluminates,titanates, nitrides, or any combination thereof. Examples of high-kmaterials (with a dielectric constant greater than 7.0) include, but arenot limited to, metal oxides such as hafnium oxide, hafnium siliconoxide, hafnium silicon oxynitride, lanthanum oxide, lanthanum aluminumoxide, zirconium oxide, zirconium silicon oxide, zirconium siliconoxynitride, tantalum oxide, titanium oxide, barium strontium titaniumoxide, barium titanium oxide, strontium titanium oxide, yttrium oxide,aluminum oxide, lead scandium tantalum oxide, and lead zinc niobate. Thehigh-k material can further include dopants such as, for example,lanthanum and aluminum. The dielectric layer 809 can be formed bysuitable deposition processes, for example, chemical vapor deposition(CVD), plasma-enhanced chemical vapor deposition (PECVD), atomic layerdeposition (ALD), evaporation, physical vapor deposition (PVD), chemicalsolution deposition, or other like processes.

The back gate stack 808 is deposited on the dielectric layer 809. Theback gate stack 808 can be the same or different from the starting backgate stack 220′ (see FIG. 2). The back gate stack 808 includes a stackof gate metals, including a work function metal disposed on thedielectric layer 809 and a conductive gate metal. The types of workfunction metal used depend on the type of transistor. Non-limitingexamples of suitable work function metals include p-type work functionmetal materials and n-type work function metal materials. P-type workfunction materials include compositions such as ruthenium, palladium,platinum, cobalt, nickel, and conductive metal oxides, or anycombination thereof. N-type metal materials include compositions such ashafnium, zirconium, titanium, tantalum, aluminum, metal carbides (e.g.,hafnium carbide, zirconium carbide, titanium carbide, and aluminumcarbide), aluminides, or any combination thereof. The work functionmetals are deposited by a suitable deposition process, for example, CVD,PECVD, PVD, plating, thermal or e-beam evaporation, and sputtering.

The back gate stack 808 includes a conductive gate metal deposited overthe work function metal. Non-limiting examples of suitable conductivemetals include aluminum (Al), platinum (Pt), gold (Au), tungsten (W),titanium (Ti), or any combination thereof. The conductive metal isdeposited by a suitable deposition process, for example, CVD, PECVD,PVD, plating, thermal or e-beam evaporation, and sputtering. Aplanarization process, for example, chemical mechanical planarization(CMP), is performed to polish the surface of the metals to form the backgate stack 808.

FIG. 9 is a cross-sectional side view after recessing the back gatestack 808 and the dielectric layer 809. The back gate stack 808 anddielectric layer 809 are recessed to a level below the top spacer 211.The top spacer is arranged on the back gate stack 808 but is shorterthan the top spacer 211 arranged on the front gate stack 220′. The backgate stack 808 extends from the insulator 606 to the top spacer 211. Theback gate stack 808 is thinner than the front gate stack 220. The backgate stack 808 and dielectric layer 809 are recessed by one or more etchprocesses, for example, a plasma etch, RIE, a wet etch, or any suitablecombination of those techniques. In some embodiments, the back gatestack 220′ is etched by a directional RIE process followed by anisotropic etch process. For example, when the back gate stack 220′includes tungsten and titanium nitride (TiN), tungsten can be etched bySF₆, CF₄, CBF₃, and or CHF₃ mixed with oxygen. TiN can is etched by awet etch process including ammonia and hydroperoxide.

FIG. 10 is a cross-sectional side view after removing the mask 301 overthe front gate side and depositing an ILD 1000 on the back gate stack808. The ILD 1000 can be the same or different from the ILD 230. The ILD1000 can be formed from, for example, a low-k dielectric material (withk<4.0), including but not limited to, silicon oxide, spin-on-glass, aflowable oxide, a high-density plasma oxide, borophosphosilicate glass(BPSG), or any combination thereof. The ILD 1000 is deposited by adeposition process, including, but not limited to CVD, PVD, plasmaenhanced CVD, atomic layer deposition (ALD), evaporation, chemicalsolution deposition, or like processes.

As shown in the asymmetric device of FIG. 10, the back gate stack 808and the front gate stack 220 are different, having differentthicknesses, and optionally, different metals. The back gate is thinnerand confined to the source 203 side of the device, as the back gatestack 808 is arranged on a thick layer of insulator 606. The layer ofinsulator 606 is thicker than the back gate stack 808 in someembodiments. The back gate stack 808 has a thickness that is smallerthan a thickness of the front gate stack 220. The front gate stack 220contacts the drain 202, channel 204, and source 203. However, the backgate stack 808 is confined to the source 203 side, instead of across theentire channel 204. Because of the differences in the gates, differentvoltages can be applied to the back gate, compared to the front gate, totune the device characteristics.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments described. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdescribed herein.

What is claimed is:
 1. A method of making a vertical transistor device,the method comprising: forming a front gate and a back gate opposite amajor surface of a substrate, the front gate and the back gate beingsymmetric and arranged on opposing sides of a channel between the frontgate and the back gate, the channel extending from a drain to a source;forming a mask to cover the front gate; removing the back gate; andreplacing the back gate with a layer of insulator and another back gatestack, the another back gate stack only covering a junction between thechannel and the source, and remaining portions of the back gate beingthe layer of insulator.
 2. The method of claim 1, wherein the source iswider than the channel.
 3. The method of claim 1, wherein the drain iswider than the channel.
 4. The method of claim 1, wherein the back gatefurther comprises a top spacer, and a portion of the top spacer is alsoremoved during removing the back gate.
 5. The method of claim 4, whereina portion of the top spacer remains beneath the source when the portionof the top spacer is also removed.
 6. The method of claim 1, wherein thelayer of insulator comprises an oxide.
 7. The method of claim 1 furthercomprising depositing a gate dielectric layer on the layer of insulatorbefore depositing the back gate stack.
 8. The method of claim 7, whereinthe gate dielectric layer is arranged on the layer of insulator andlines surfaces of the channel, the source, and the top spacer.
 9. Amethod of making a vertical transistor device, the method comprising:forming a front gate and a back gate on a substrate, the front gate andthe back gate being symmetric and arranged on opposing sides of achannel between the front gate and the back gate, the channel extendingvertically from a drain to a source, a bottom spacer arranged betweenthe front gate and the drain and between the back gate and the drain, atop spacer arranged between the front gate and the source and the backgate and the source, and an interlevel dielectric (ILD) deposited on thefront gate and the back gate; forming a mask to cover the front gate;recessing the ILD to expose the back gate; removing the back gate and aportion of the top spacer; depositing a layer of insulator in theopening formed where the back gate was removed; recessing the layer ofinsulator; depositing a back gate stack on the layer of insulator; andrecessing the back gate stack such that the back gate stack extends fromthe layer of insulator to the top spacer.
 10. The method of claim 9,wherein recessing the layer of insulator exposes a source-drainjunction.
 11. The method of claim 9, wherein the layer of insulator isrecessed to a level below the channel.
 12. The method of claim 9,wherein the back gate includes a gate dielectric layer, and the gatedielectric layer is not removed during removing the back gate.
 13. Themethod of claim 12, wherein the back gate stack deposited on the layerof insulator is deposited directly on the gate dielectric layer.
 14. Themethod of claim 12 further comprising depositing another gate dielectricon the gate dielectric layer before depositing the back gate stack. 15.The method of claim 9, wherein the back gate includes a gate dielectriclayer, and the gate dielectric layer is also removed during removing theback gate.
 16. The method of claim 15 further comprising depositinganother gate dielectric layer before depositing the back gate stack. 17.The method of claim 9 further comprising depositing an ILD on the backgate stack after recessing the back gate stack.